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Panasonic: Plasma Cleaning System PC30B-HS/PC32P-MS

PC30B-HS PC32P-MS

PC30B-HS and PC32P-MS improve the bondability onto a gold plated electrode by original nickel removing process. Thus a cheap gold plating can be used and eventually costs will be cut sharply. And also the oxygen plasma suitable for the improvement o fthe resin adhesion is supported.

Substantial reductions in substrate costs contribute to customers' profits

The reason why an extra-thin gold plated electrode can be used
When a extra-thin gold plated electrode is used, nickel compunds are formed on a surface after the heat treament by the die-bonding cure. These nickel compunds impair the wire bonding performance, thus it is said that a thin gold plated electrode is unsuitable for wire bonding. However, the argon plasma treatment eliminates the nickel conpunds, therefore stable wire bonding can be performed on an extra-thin and extra cheap gold pated electrode.

Surface reforming by oxygen plasma
Surface reforming by oxygen radical improves nold resin adhesion and under-fill wettability. [optional]

Specifications
Model PC30B-HS PC32P-MS
Model No. KXF-919D KXF-907D
Cycle Time 15s/substrate (30s/2 substrate) 45s/substrate
(30s/substrate for less than 150mm substrate in length)
Substrate Size L 50mm X W 20mm ~ L 250mm X W 70mm L 50mm X W 20mm ~ L 330mm X W 160mm
Substrate Thickness 0.07mm ~ 2.0mm 0.5mm ~ 2.0mm
Cleaning Method RF parallel electrode type
Gas for Electrical Discharge Ar [optional : 02]
Transfer Type Two-fold buffer cassette Two-fold buffer cassette changer
Application Substrate BGA, CSP substrate COB substrate
Power Supply Single phase AC 200V ± 10V, 4 kVa
Air and Gas Supply Air: 440kPa, 6.5 l/min   Gas: Gas cylinder
Dimensions L 1500mm X D 800 mm X H 1600mm L 1770mm X D 800 mm X H 1600mm
Mass 550kg 650kg
*Value such as cycle time, may vary depending on operational conditions.